High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers

Akca, B. Imran and Ismail, Nur and Sengo, Gabriel and Sun, Fei and Wörhoff, Kerstin and Pollnau, Markus and Ridder de, René M. (2010) High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2010, 18-19 November 2010, Delft, The Netherlands.

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Abstract:	We present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) spectrometers operating around 800 nm and 1300 nm. A 100-channel AWG with 0.4 nm channel spacing centered at 1300 nm and a 125-channel AWG with 0.16 nm channel spacing centered at 800 nm have been fabricated and characterized. The measured crosstalk and insertion loss values near the central wavelengths were ranging between -22 and -32 dB and between 3.2 and 2 dB for 800-nm AWG and 1300-nm AWG, respectively. The highest wavelength resolution (0.16 nm) and the largest free spectral range value (38.8 nm) have been achieved in SiON technology so far.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/75723
Conference URL:	http://www.photonics-benelux.org/symposium/
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