High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers


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Akca, B. Imran and Ismail, Nur and Sengo, Gabriel and Sun, Fei and Wörhoff, Kerstin and Pollnau, Markus and Ridder de, René M. (2010) High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2010, 18-19 November 2010, Delft, The Netherlands.

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Abstract:We present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) spectrometers operating around 800 nm and 1300 nm. A 100-channel AWG with 0.4 nm channel spacing centered at 1300 nm and a 125-channel AWG with 0.16 nm channel spacing centered at 800 nm have been fabricated and characterized. The measured crosstalk and insertion loss values near the central wavelengths were ranging between -22 and -32 dB and between 3.2 and 2 dB for 800-nm AWG and 1300-nm AWG, respectively. The highest wavelength resolution (0.16 nm) and the largest free spectral range value (38.8 nm) have been achieved in SiON technology so far.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75723
Conference URL:http://www.photonics-benelux.org/symposium/
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