Focused Ion Beam Nanostructured Gratings in Crystalline KYW:$Yb^{3+}$ Channel Waveguides


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Ay, Feridun and Geskus, Dimitri and Inurrategui, Ion and Aravazhi, Shanmugam and Gadgil, Vishwas J. and Wörhoff, Kerstin and Pollnau, Markus (2010) Focused Ion Beam Nanostructured Gratings in Crystalline KYW:$Yb^{3+}$ Channel Waveguides. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2010, 18-19 November 2010, Delft, The Netherlands (pp. pp. 265-268).

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Abstract:We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3° were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75722
Conference URL:http://www.photonics-benelux.org/symposium/
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