Focused Ion Beam Nanostructured Gratings in Crystalline KYW: Channel Waveguides
Ay, Feridun and Geskus, Dimitri and Inurrategui, Ion and Aravazhi, Shanmugam and Gadgil, Vishwas J. and Wörhoff, Kerstin and Pollnau, Markus (2010) Focused Ion Beam Nanostructured Gratings in Crystalline KYW: Channel Waveguides. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2010, 18-19 November 2010, Delft, The Netherlands (pp. pp. 265-268).
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|Abstract:||We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3° were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.
|Item Type:||Conference or Workshop Item|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/75722|
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