Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Dagamseh, A.M.K. and Lammerink, T.S.J. and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico.

Preview

PDF
1228Kb

Abstract:	Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/75673
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page