Long-range elastic guidance mechanisms for electrostatic comb-drive actuators


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Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, May 31 - June 4, 2010, Delft, the Netherlands.

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Abstract:The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].
Item Type:Conference or Workshop Item
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Engineering Technology (CTW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75635
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