Novel RF-MEMS capacitive switching structures
Rottenberg, X. and Jansen, H. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy.
|Abstract:||This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up capacitance ratio all that are not possible with standard characteristics compared to standard RF-MEMS capacitive switches, in the frequency range from 1 to 30 GHz. Down/up capacitance ratios higher than 450 have been measured, an improvement of a factor 34 over standard designs with equal size and using the same materials.
|Item Type:||Conference or Workshop Item|
|Copyright:||© 2002 IEEE|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/75621|
|Export this item as:||BibTeX|
Daily downloads in the past month
Monthly downloads in the past 12 months
Repository Staff Only: item control page