Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity


Pham, S.V. and Kauppinen, L.J. and Dijkstra, M. and Wolferen, H.A.G.M. van and Ridder, R.M. de and Hoekstra, H.J.W.M. (2010) Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity. In: 15th European Conference on Integrated Optics and Technical Exhibition, ECIO 2010, 6-9 April 2010, Cambridge, UK (pp. ThE6).

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Abstract:We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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