Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity

Pham, S.V. and Kauppinen, L.J. and Dijkstra, M. and Wolferen van, H.A.G.M. and Ridder de, R.M. and Hoekstra, H.J.W.M. (2010) Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity. In: 15th European Conference on Integrated Optics and Technical Exhibition, ECIO 2010, 6-9 April 2010, Cambridge, UK.

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Abstract:	We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/75351
Conference URL:	http://www.ecio2010.eu/
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