Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements, 2004, 27 June - 2 July 2004, London, UK.

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Abstract:	The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given
Item Type:	Conference or Workshop Item
Copyright:	© 2004 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/75347
Official URL:	http://dx.doi.org/10.1109/CPEM.2004.305488
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Metis ID: 219828