Roughness evolution of Si surfaces upon Ar ion erosion


Rooij-Lohmann, V.I.T.A. de and Kozhevnikov, I.V. and Peverini, L. and Ziegler, E. and Cuerno, R. and Bijkerk, F. and Yakshin, A.E. (2010) Roughness evolution of Si surfaces upon Ar ion erosion. Applied Surface Science, 256 (16). pp. 5011-5014. ISSN 0169-4332

[img] PDF
Restricted to UT campus only
: Request a copy
Abstract:We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent
Item Type:Article
Copyright:© 2010 Elsevier B.V.
Science and Technology (TNW)
Research Group:
Link to this item:
Official URL:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 270288