System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

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Abstract:	An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.
Item Type:	Patent
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/75124
Official URL:	http://v3.espacenet.com/publicationDetails/biblio?CC=US&NR=7835157B2&KC=B2&FT=D&date=20101116&DB=EPODOC&locale=en_EP
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