Bragg Gratings in Crystalline Waveguides Fabricated by Focused Ion Beam Milling

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Inurrategi, I. and Ay, F. and Geskus, D. and Aravazhi, S. and Gadgil, V.J. and Wörhoff, K. and Pollnau, M. (2010) Bragg Gratings in Crystalline Waveguides Fabricated by Focused Ion Beam Milling. In: 2nd International Workshop on FIB for Photonics, 6-7 Apr 2010, Cambridge, UK.

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Abstract:Results of an optimization study of deeply-etched Bragg gratings in KY(WO4)2:Yb3+ to obtain photonic cavity structures are reported. By optimizing parameters such as dose per area, dwell time and pixel resolution the redeposition effects are minimized and 4.3um-deep gratings are achieved.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75035
Official URL:http://www.bris.ac.uk/eeng/research/pho/fib4proc2.pdf
Conference URL:http://www.bris.ac.uk/eeng/research/pho/fib4photonics.html
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