Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules

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Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2008) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

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Abstract:An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.

Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/75004
Official URL:http://ip.com/patent/US7368311
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