Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules
Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2008) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.
|Abstract:||An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/75004|
|Export this item as:||BibTeX|
Daily downloads in the past month
Monthly downloads in the past 12 months
Repository Staff Only: item control page