Mechanical tuning of optical race-track ring resonators


Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5 . pp. 424-427. ISSN 1877-7058

open access
Abstract:This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.

Item Type:Article
Additional information:Open access. Eurosensor XXIV Conference, Linz, Austria, 5-8 September 2010
Copyright:© 2010 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Official URL:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page