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Switchable capacitor and method of making the same
Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2004) Switchable capacitor and method of making the same. Patent.
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| Abstract: | A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation. |
| Item Type: | Patent |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/74916 |
| Official URL: | http://v3.espacenet.com/publicationDetails/biblio?DB=EPODOC&adjacent=true&locale=en_EP&FT=D&date=20040701&CC=US&NR=2004124497A1&KC=A1 |
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