Fabrication of cantilever arrays with tips for parallel optical readout

Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

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Abstract:	We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/74828
Conference URL:	http://www.utwente.nl/ewi/mme2010/
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