Determination of young's modulus of PZT-influence of cantilever orientation

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Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 257-260).

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Abstract:Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined
the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/74826
Conference URL:http://www.utwente.nl/ewi/mme2010/
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