A Musical instrument in MEMS


Engelen, J.B.C. and Boer, H. de and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and Graaf, D. de and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 193-196).

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Abstract:In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening, in a musical composition especially made for the occasion.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/74825
Conference URL:http://www.utwente.nl/ewi/mme2010/
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