Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

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Sarajlic, E. and Geerlings, J. and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

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Abstract:Scanning rates of the atomic force microscope (AFM) could be significantly
increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single
crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating
feasibility and the large innovation potential of this method.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/74823
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