A study on performance improvement of MEMS hair flow sensors by parametric amplification

Droogendijk, H. and Krijnen, G.J.M. (2010) A study on performance improvement of MEMS hair flow sensors by parametric amplification. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010, 18-19 Nov 2010, Veldhoven, The Netherlands.

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Abstract:	Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. Improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise in sensitivity, dynamic range and selectivity.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/74755
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