Process for producing micromechanical structures by means of reactieve ion etching

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Jansen, Henricus Venantius and Boer de, Meint Jelle and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

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Abstract:A process for producing etched micromechanical structures is provided, using Reactive Ion Etching (RIE), wherein a substrate is etched with a silicon etch gas mixture to obtain an aspect ratio of at least 10. The process comprises the steps of: a) anisotropic etching using a first silicon etch gas to obtain a primary microstructure; b) depositing a halocarbon film on the walls of the primary microstructure; d) isotropic etching using a second silicon etch gas, to obtain a final microstructure; said steps being carried out in a single run. Optional further steps are: c) etching the floor of the primary microstructure using said first silicon etch gas; and e) depositing a halocarbon film on the surface of the final microstructure. The process may involve applying high pressure (5-30 Pa) and low energy (10-90 eV), and preferably the use of a sulphur hexafluoride/oxygen/trifluoromethane plasma. The process can be controlled by monitoring the blackening of a silicon test surface as a function of varying the process parameters.
Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/74705
Official URL:http://tinyurl.com/34hglvn
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