Particles in Semiconductor Processing

Knotter, D. Martin and Wali, Faisal (2009) Particles in Semiconductor Processing. In: Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants. Elsevier, Amsterdam, pp. 81-120. ISBN 9781437778304

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Abstract:	Advances in integrated circuits (ICs) have a high impact on society. These advances result in continuously increasing performance of home personal computers, higher density flash memory chips, faster wireless communication in combination with smaller antennas, and all kinds of combinations of the aforementioned components. The main characteristic of these advances has been the shrinking dimension of the features of which the ICs are made.
Item Type:	Book Section
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/74666
Official URL:	http://dx.doi.org/10.1016/B978-1-4377-7830-4.10003-9
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