Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides

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Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

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Abstract:This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/74661
Conference URL:http://www.utwente.nl/ewi/mme2010/
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