Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, M.D. and Rijnders, G. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: 36th International Micro & Nano Engineering Conference, MNE 2010, 19-22 Sept 2010, Genoa, Italy.

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Abstract:	In this work we show for the first time that the effective in-plane Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films, deposited by pulsed laser deposition (PLD) on dedicated single crystal silicon cantilevers, is independent of the in-plane orientation of cantilevers.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Inorganic Materials Science (IMS)
Link to this item:	http://purl.utwente.nl/publications/74553
Conference URL:	http://www.mne2010.org/
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