Fabrication of a micro cryogenic cold stage using MEMS-technology


Lerou, P.P.P.M. and Venhorst, G.C.F. and Berends, C.F. and Veenstra, T.T. and Blom, M. and Burger, J.F. and Brake, H.J.M. ter and Rogalla, H. (2006) Fabrication of a micro cryogenic cold stage using MEMS-technology. Journal of Micromechanics and Microengineering, 16 . pp. 1919-1925. ISSN 0960-1317

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Abstract:This paper describes the design and production process of a variety of reliable micro cryogenic coolers. The different cold stages are based on an optimized design found during a study which was done to maximize the cold-stage effectiveness. Typical cold-stage dimensions are 30 × 2 × 0.5 mm with an expected net cooling power varying from 10 mW to 20 mW at a tip temperature of 96 K. A cold stage consists of a stack of three fusion bonded D263T glass wafers. The production process has 7 lithography steps and roughly 100 process steps. In order to determine the maximum bend, shear and bond stresses inside a 175 µm thick D263T glass wafer, several pressure tests were performed.
Item Type:Article
Copyright:© IOP Publishing
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/74335
Official URL:https://doi.org/10.1088/0960-1317/16/10/002
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