Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Brouwer, D.M. and Jong de, B.R. and Soemers, H.M.J.R. and Dijk van, J. (2006) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application. Journal of Micromechanics and Microengineering, 16 (6). S7-S12. ISSN 0960-1317

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Abstract:	A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design
Item Type:	Article
Copyright:	© Institute of Physics
Faculty:	Engineering Technology (CTW)
Research Group:	Mechanical Automation and Mechatronics Transducers Science and Technology (TST) Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/74321
Official URL:	http://dx.doi.org/10.1088/0960-1317/16/6/S02
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