Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements


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Dagamseh, A.M.K. and Bruinink, C.M. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements. In: IEEE Sensors 2010 conference, 1-4 November 2010, Hawaii, USA.

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Abstract:This paper addresses the latest developments in biomimetic hair-flow sensors towards sensitive high-density arrays. Improving the electrodes design of the hair sensor, using Silicon-on-Insulator (SOI) wafer technology, has resulted in the ability to measure small capacitance changes as caused by minute rotations of single-hair sensors. The detection limit, as measured in a bandwidth of 3 kHz, was about 1 mm/s air-flow amplitude, an enhancement of 52% in comparison to the previous hair-sensor array design. The directivity pattern was improved now closely resembling a figure of eight. These sensors open possibilities for high-resolution flow pattern observations.
Item Type:Conference or Workshop Item
Copyright:© 2010 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/74160
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