Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

Dumitrescu, Marius and Cobianu, Cornel and Lungu, Dan and Pascu, Adrian and Kolev, Spas and Berg van den, Albert (1999) Thermal simulation of surface micromachined polysilicon hot plates of low power consumption. Sensors and Actuators A: Physical, 76 (1-3). pp. 51-56. ISSN 0924-4247

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Abstract:	A simple, IC compatible, surface micromachined polysilicon membrane was technologically designed and thermally simulated by 3D finite element ‘COSMOS' program in order to investigate its capability to work as a micro hot plate for a gas sensing test structure of low power consumption. For an optimized layout based on four ‘poly' suspended bridges and a central ‘poly' pillar supporting the 110×110 μm2 ‘poly' membrane separated from the silicon substrate by 1 μm of air gap, temperatures as high as 673 K were obtained for an input power of 100 mW.
Item Type:	Article
Copyright:	© 1999 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/73992
Official URL:	http://dx.doi.org/10.1016/S0924-4247(99)00042-4
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