Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

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Dagamseh, A.M.K. and Lammerink, T.S.J. and Kolster, M.L. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system. Sensors and Actuators A: Physical, 162 (2). pp. 355-360. ISSN 0924-4247

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Abstract:In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel.
Item Type:Article
Copyright:© 2010 Elsevier
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/73658
Official URL:http://dx.doi.org/10.1016/j.sna.2010.02.016
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