Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images

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Yamahata, Christophe and Sarajlic, Edin and Krijnen, Gijs J.M. and Gijs, Martin A.M. (2010) Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images. Journal of Microelectromechanical Systems, 19 (5). pp. 1273-1275. ISSN 1057-7157

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Abstract:Abstract—In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic
micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform
analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive
sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]
Item Type:Article
Copyright:© 2010 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/73520
Official URL:http://dx.doi.org/10.1109/JMEMS.2010.2067445
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