Optimized comb drive finger shape for shock-resistant actuation


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Engelen, Johan B.C. and Abelmann, Leon and Elwenspoek, Miko C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong .

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Abstract:This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.
Item Type:Conference or Workshop Item
Copyright:© 2010 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/73516
Official URL:http://dx.doi.org/10.1109/MEMSYS.2010.5442414
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