Calibration method for rotating-analyzer ellipsometers

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Nijs de, J.M.M. and Holtslag, A.H.M. and Hoekstra, A and Silfhout van, A. (1988) Calibration method for rotating-analyzer ellipsometers. Journal of the Optical Society of America A: Optics and image science, 5 (9). p. 1466. ISSN 0740-3232

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Abstract:In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.
Item Type:Article
Copyright:© 1988 Optical Society of America
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Link to this item:http://purl.utwente.nl/publications/73186
Official URL:http://dx.doi.org/10.1364/JOSAA.5.001466
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