Calibration method for rotating-analyzer ellipsometers


Nijs, J.M.M. de and Holtslag, A.H.M. and Hoekstra, A and Silfhout, A. van (1988) Calibration method for rotating-analyzer ellipsometers. Journal of the Optical Society of America A: Optics and image science, 5 (9). p. 1466. ISSN 0740-3232

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Abstract:In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.
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Copyright:© 1988 Optical Society of America
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