Integrated automatic modular measuring system

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Baikie, I.D. and Werf van der, K.O. and Hanekamp, L.J. (1988) Integrated automatic modular measuring system. Review of Scientific Instruments, 59 (9). p. 2075. ISSN 0034-6748

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Abstract:This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.
Item Type:Article
Copyright:© American Institute of Physics
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Link to this item:http://purl.utwente.nl/publications/73185
Official URL:http://dx.doi.org/10.1063/1.1140028
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