Diffusion on semiconductor surfaces

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Zandvliet, Harold J.W. and Poelsema, Bene and Swartzentruber, Brian S. (2001) Diffusion on semiconductor surfaces. Physics Today, 54 (7). pp. 40-45. ISSN 0031-9228

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Abstract:Semiconductor devices continue to get ever smaller, which means that individual defects play an increasingly important role in their performance. In the process of fabricating more innovative, better performing devices, crystal growers have developed an amazing intuition about how atoms and molecules behave on crystal surfaces. Their intuition, formed from knowledge of fundamental atomic-scale processes and honed through experience, concerns such questions as where atoms and molecules stick, how they interact with each other and the substrate, and how they diffuse
Item Type:Article
Copyright:© 2001 American Institute of Physics
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/73138
Official URL:http://dx.doi.org/10.1063/1.1397393
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Metis ID: 202541