Kinetic growth manipulation of Si(0 0 1) homoepitaxy

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Esser, Marcus and Zoethout, Erwin and Zandvliet, Harold J.W. and Wormeester, Herbert and Poelsema, Bene (2004) Kinetic growth manipulation of Si(0 0 1) homoepitaxy. Surface Science, 552 (1-3). pp. 35-45. ISSN 0039-6028

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Abstract:We have confirmed in a combined diffraction and STM study that the usual kinetic growth manipulation (KGM) applied to Si/Si(0 0 1) (nucleation at relatively low temperatures and completion of monolayer growth at high temperatures) does not lead to a smooth growth front. We have identified the physical reason for this unexpected behaviour: an anti phase boundary (APB) network develops during growth, due to the 2 × 1 reconstruction of the clean Si(0 0 1) surface. The density of this APB network can be substantially reduced by application of a different and optimised KGM procedure. Following a recipe in which 1 ML of Si on Si(0 0 1) is deposited at a relatively low temperature (525 K), followed by a short anneal to 750 K, results in a surface flatness similar to that of the clean Si(0 0 1) 2 × 1 surface. Up to 10 ML of material deposited with a flash anneal after the deposition of each additional layer resulted in a surface with a negligible reduction of the in-phase and out-of-phase intensity of a reflected low energy electron beam, indicative of an almost perfectly smooth growth front. STM images support this observation. The low thermal budget of this method reduces intermixing effects in hetero-epitaxial growth of group IV semiconductor (0 0 1)-faces.
Item Type:Article
Copyright:© 2004 Elsevier B.V.
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/73073
Official URL:http://dx.doi.org/10.1016/j.susc.2004.01.012
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Metis ID: 220678