Oxidized Gold as an Ultrathin Etch Resist Applied in Microcontact Printing


Sharpe, Ruben B.A. and Burdinski, Dirk and Huskens, Jurriaan and Zandvliet, Harold J.W. and Reinhoudt, David N. and Poelsema, Bene (2006) Oxidized Gold as an Ultrathin Etch Resist Applied in Microcontact Printing. Journal of the American Ceramic Society, 128 (49). pp. 15560-15561. ISSN 0002-7820

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Abstract:In this report it is described how a gold surface can be treated with an oxygen plasma to become an effective etch mask, with its etch resistive properties based upon electrostatic repulsion. Such a treated gold layer is only temporarily stable and may therefore be employed as a temporary etch barrier that introduces no contaminating species. Deterioration of the barrier properties can be locally expedited in a scheme that is compatible with microcontact printing. This has been achieved by the microcontact printing of a reductant on a fully oxidized gold substrate.
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Copyright:© 2006 American Chemical Society
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/73062
Official URL:https://doi.org/10.1021/ja065291b
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