Optimization of capactive microphone and pressure sensor performance by capacitor-electrode shaping

Voorthuyzen, J.A. and Sprenkels, A.J. and Donk van der, A.G.H. and Scheeper, P.R. and Bergveld, P. (1991) Optimization of capactive microphone and pressure sensor performance by capacitor-electrode shaping. Sensors and Actuators A: Physical, 26 (1-3). pp. 331-336. ISSN 0924-4247

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Abstract:	In many designs of capacitive microphones or pressure sensors the electrode size is chosen to be equal to the diaphragm size. In this paper it will be discussed whether an electrode size or shape that differs from that of the diaphragm is attractive for obtaining a maximum value for the sensor sensitivity and the signal-to-noise ratio. A theoretical analysis will be given for circular diaphragms and electrodes, from which it can be shown that for maximum sensitivity the electrode should be located at the centre of the diaphragm, with a radius depending on the value of the amplifier input capacitance.
Item Type:	Article
Copyright:	© 1991 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/72983
Official URL:	http://dx.doi.org/10.1016/0924-4247(91)87012-R
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