Parallel optical readout of cantilever arrays in dynamic mode

Koelmans, W.W. and Honschoten van, J. and Vries de, J. and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). p. 395503. ISSN 0957-4484

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Abstract:	Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser–diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the received signal. Addressing is accomplished by exciting the array with the sum of all cantilever resonant frequencies. This technique requires considerably less hardware compared to other parallel optical readout techniques. Readout is demonstrated in beam deflection mode and interference mode. Many cantilevers can be readout in parallel, limited by the oscillators' quality factor and available bandwidth. The proposed technique facilitates parallelism in applications at the nano-scale, including probe-based data storage and biological sensing.
Item Type:	Article
Copyright:	© IOP Publishing 2010
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/72960
Official URL:	http://dx.doi.org/10.1088/0957-4484/21/39/395503
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