R.F. planar magnetron sputtered ZnO films II: Electrical properties


Blom, F.R. and Pol, F.C.M. van de and Bauhuis, G. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films II: Electrical properties. Thin solid films, 204 (2). pp. 365-376. ISSN 0040-6090

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Abstract:The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements.

These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties.

A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.
Item Type:Article
Copyright:© 1991 Elsevier
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/72930
Official URL:https://doi.org/10.1016/0040-6090(91)90075-9
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