R.F. planar magnetron sputtered ZnO films II: Electrical properties
|Abstract:||The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements.
These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties.
A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied.
|Copyright:||© 1991 Elsevier|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/72930|
|Export this item as:||BibTeX|
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