Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

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Rooij-Lohmann, V.I.T.A. de and Kleyn, A.W. and Bijkerk, F. and Brongersma, H.H. and Yakshin, A.E. (2009) Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy. Applied Physics Letters, 94 (063107). 063107. ISSN 0003-6951

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Abstract:An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.
Item Type:Article
Copyright:© 2009 American Institute of Physics
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/72831
Official URL:http://dx.doi.org/10.1063/1.3081034
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Metis ID: 258514