An improved discharge technique for excimer lasers

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Gerritsen, J.W. and Keet, A.L. and Ernst, G.J. and Witteman, W.J. (1990) An improved discharge technique for excimer lasers. Optics Communications, 77 (5-6). pp. 395-396. ISSN 0030-4018

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Abstract:The further development of discharge excimer lasers depends upon a better degree of control over the discharge stability. A problem is the large difference between the breakdown and steady-state voltage which requires a time dependent impedance of the power circuit. Further the large attachment rates of halogens like HCl, causing electric field disturbances require a short rise time of the applied current pulse. A large effort has been expended towards this goal by researchers since the early development of discharge excimer lasers.
Item Type:Article
Copyright:© 1990 Elsevier
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Link to this item:http://purl.utwente.nl/publications/72674
Official URL:http://dx.doi.org/10.1016/0030-4018(90)90132-D
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