Fast RF-CV characterization through high-speed 1-port S-parameter measurements


Herfst, R.W. and Steeneken, P.G. and Tiggelman, M.P.J. and Stulemeijer, J. and Schmitz, J. (2010) Fast RF-CV characterization through high-speed 1-port S-parameter measurements. In: Proceedings of IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan (pp. pp. 170-173).

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Abstract:We present a novel method to measure the capacitance-voltage relation of an electronic device. The approach is accurate, very fast, and cost-effective compared to the existing off-the-shelf solutions. Capacitances are determined using a single-frequency 1-port S-parameter setup constructed from discrete components. We introduce a new way to correct for non-linearities of the used components, which greatly increases the accuracy with which the phase and magnitude of the reflected signal is measured. The measurement technique is validated on an RF-MEMS capacitive switch and a BST tunable capacitor. Complete capacitance-voltage curves are measured in less than a millisecond, with a measurement accuracy well below 1%.

Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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