Thin Films of Conductive ZnO Patterned by Micromolding Resulting in Nearly Isolated Features

Göbel, Ole F. and Blank, Dave H.A. and Elshof ten, Johan E. (2010) Thin Films of Conductive ZnO Patterned by Micromolding Resulting in Nearly Isolated Features. ACS Applied materials and interfaces, 2 (2). pp. 536-543. ISSN 1944-8244

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Abstract:	Patterned and continuous thin films of conductive Al-doped zinc oxide (ZnO:Al) were prepared on different substrates from a polymeric precursor solution. Their electric conductivity and light transmittance (for visible and UV light) was measured at room temperature. By means of a simple device, conductive ZnO:Al films with high fidelity patterns with features of 2−20 μm width could be obtained by simply micromolding the liquid precursor film prior to heat treatment. The individual features were interconnected by a very thin residual ZnO layer.
Item Type:	Article
Copyright:	ACS
Faculty:	Science and Technology (TNW)
Research Group:	Inorganic Materials Science (IMS)
Link to this item:	http://purl.utwente.nl/publications/72407
Official URL:	http://dx.doi.org/10.1016/10.1021/am9007374
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