Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography

Ay, F. and Bernhardi, E.H. and Agazzi, L. and Bradley, J.D.B. and Wörhoff, K. and Pollnau, M. and Ridder de, R.M. (2010) Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography. In: Conference on Lasers and Electro-Optics, CLEO '10, 16-21 May 2010, San Jose, CA.

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Abstract:	Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.
Item Type:	Conference or Workshop Item
Copyright:	© 2010 Optical Society of America
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/72276
Official URL:	http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2010-CMQ4
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