Listening to MEMS: An acoustic vibrometer

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M. (2010) Listening to MEMS: An acoustic vibrometer. In: IEEE 23rd International Conference on Micro Electro Mechanical Systems, MEMS 2010, 24-28 Jan 2010, Hong Kong.

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Abstract:	new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.
Item Type:	Conference or Workshop Item
Copyright:	© 2010 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/72271
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2010.5442319
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