Listening to MEMS: An acoustic vibrometer


Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M. (2010) Listening to MEMS: An acoustic vibrometer. In: IEEE 23rd International Conference on Micro Electro Mechanical Systems, MEMS 2010, 24-28 Jan 2010, Hong Kong (pp. pp. 663-666).

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Abstract: new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.
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Copyright:© 2010 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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