Soft-lithographic patterning of functional oxide and composite materials

Khan, Sajid Ullah (2010) Soft-lithographic patterning of functional oxide and composite materials. thesis.

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Abstract:	This thesis gives an overview of the progress made in recent years in the development of low-cost parallel patterning techniques for ceramic materials, silica, and organic-inorganic silsesquioxane-based hybrids from wet-chemical solutions and suspensions on the micrometer and nanometer scale. The emphasis of the discussion is placed on the application of soft- lithographic methods. In general, molding-based patterning approaches and surface modification-based patterning approaches can be distinguished. Lateral resolutions well below 100 nm have been accomplished with some of these methods, but the fabrication of high-aspect ratio patterns remains a challenge.
Item Type:	Thesis
Research Group:	Inorganic Materials Science (IMS)
Link to this item:	http://purl.utwente.nl/publications/71950
Official URL:	http://dx.doi.org/10.3990/1.9789036530545
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