Poly(ferrocenylsilanes) as etch barriers in nano and microlithographic applications

Hempenius, Mark A. and Lammertink, Rob G.H. and Peter, Mária and Vancso, G. Julius (2003) Poly(ferrocenylsilanes) as etch barriers in nano and microlithographic applications. Macromolecular Symposia, 196 (1). pp. 45-56. ISSN 1022-1360

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Abstract:	Thin films of organic-organometallic block copolymers are shown to be efficient self-assembled templates for nanolithography. Block copolymers composed of organic blocks such as polyisoprene or polystyrene and a poly(ferrocenylsilane) block microphase separate to form a monolayer of densely packed organometallic spheres in an organic matrix. The high resistance of the organometallic phase to reactive ion etching enables the nanoscale patterns to be transferred into silicon substrates, forming nano structured surfaces. Electrostatic self-assembly of poly(ferrocenylsilane) polyanions and polycations is discussed as a means to form laterally structured organometallic multilayer thin films by area-selective adsorption onto chemically patterned substrates.
Item Type:	Article
Copyright:	© 2003 Wiley InterScience
Faculty:	Science and Technology (TNW)
Research Group:	Materials Science and Technology of Polymers (MTP)
Link to this item:	http://purl.utwente.nl/publications/71931
Official URL:	http://dx.doi.org/10.1002/masy.200390175
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Metis ID: 213183