Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition


Dagamseh, Ahmad and Bruinink, Christiaan and Kolster, Marcel and Wiegerink, Remco and Lammerink, Theo and Krijnen, Gijs (2010) Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, DTIP 2010, 5-7 May 2010, Seville, Spain (pp. pp. 48-51).

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Abstract:Flow sensor arrays can be used to extract features from flow fields rather than averaging or providing local measurements provided the sensors in the array structure can be interrogated individually. This paper addresses the latest developments in fabrication and array interfacing of biomimetic artificial air-flow sensors. Hair flow sensors in wafer level arrays have been successfully fabricated using SOI wafers with deep trench isolation structures. Using a Frequency Division Multi¬plexing (FDM) technique, we were able to simultaneously measure flow signals at multiple sensor positions. By virtue of FDM, once signals are retrieved from all individual array elements, spatio-temporal flow patterns can be reconstructed, while few system interconnects are required.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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