On the use of DC measurements for ESD-related process monitoring

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Luchies, Jan Marc and Kuper, Fred and Verweij, Jan (1993) On the use of DC measurements for ESD-related process monitoring. Quality and Reliability Engineering International, 9 (4). pp. 309-313. ISSN 0748-8017

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Abstract:DC measurements and transmission line method measurements have been carried out on field oxide NMOSTs made in a 0-8 m CMOS process. Analysis shows that DC measurements can be applied for fast ESD related feedback to submicron process development.
Item Type:Article
Copyright:© 1993 Wiley InterScience
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/71000
Official URL:http://dx.doi.org/10.1002/qre.4680090412
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Metis ID: 112034