New approach for correction of distortions in spectral line profiles in Auger electron spectroscopy

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Sasse, A.G.B.M. and Wormeester, H. and Silfhout, A. van (1988) New approach for correction of distortions in spectral line profiles in Auger electron spectroscopy. Surface and Interface Analysis, 13 (4). pp. 228-232. ISSN 0142-2421

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Abstract:A new deconvolution method for Auger electron spectroscopy is presented. This method is based on a non-linear least squares minimizing routine (Levenberg-Marquardt) and global approximation using splines, solving many of the drawbacks inherent to the Van Cittert and Fourier transform based deconvolution methods. The deconvolution routine can be run on a personal computer. The application of this method goes beyond the electron spectroscopies and can be considered as a general deconvolution method.
Item Type:Article
Copyright:© 1988 Wiley InterScience
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/70853
Official URL:http://dx.doi.org/10.1002/sia.740130410
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