New approach for correction of distortions in spectral line profiles in Auger electron spectroscopy

Sasse, A.G.B.M. and Wormeester, H. and Silfhout van, A. (1988) New approach for correction of distortions in spectral line profiles in Auger electron spectroscopy. Surface and Interface Analysis, 13 (4). pp. 228-232. ISSN 0142-2421

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Abstract:	A new deconvolution method for Auger electron spectroscopy is presented. This method is based on a non-linear least squares minimizing routine (Levenberg-Marquardt) and global approximation using splines, solving many of the drawbacks inherent to the Van Cittert and Fourier transform based deconvolution methods. The deconvolution routine can be run on a personal computer. The application of this method goes beyond the electron spectroscopies and can be considered as a general deconvolution method.
Item Type:	Article
Copyright:	© 1988 Wiley InterScience
Faculty:	Science and Technology (TNW)
Research Group:	Physics of Interfaces and Nanomaterials (PIN)
Link to this item:	http://purl.utwente.nl/publications/70853
Official URL:	http://dx.doi.org/10.1002/sia.740130410
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