A silicon-based electrical source for surface plasmon polaritons

Walters, Robert J. and Loon van, Rob V.A. and Brunets, Ihor and Schmitz, Jurriaan and Polman, Albert (2009) A silicon-based electrical source for surface plasmon polaritons. In: 6th International Conference on GroupIV Photonics GFP'09, 9-11 Sept 2009, San Francisco, USA.

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Abstract:	This work demonstrates the fabrication of a silicon-based electrical source for surface plasmon polaritons (SPPs) at low temperatures using silicon nanocrystal doped alumina within a metal-insulator-metal (MIM) waveguide geometry. The fabrication method uses established microtechnology processes that are compatible with backend CMOS technology. The fabricated device suggests a route forward towards high density, active plasmonic circuits that are integrated with silicon microelectronics.
Item Type:	Conference or Workshop Item
Copyright:	© 2009 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/70009
Official URL:	http://dx.doi.org/10.1109/GROUP4.2009.5338358
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