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Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al
O
Ay, F. and Bradley, J.D.B. and Wörhoff, K. and Ridder de, R.M. and Pollnau, M. (2009) Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in AlO
. In: European Conference on Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference, CLEO Europe - EQEC 2009, 14-19 June 2009, Munich, Germany.
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| Abstract: | Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system. |
| Item Type: | Conference or Workshop Item |
| Copyright: | © 2009 IEEE |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/69968 |
| Official URL: | http://dx.doi.org/10.1109/CLEOE-EQEC.2009.5191501 |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
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