Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al$_2$O$_3$


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Ay, F. and Bradley, J.D.B. and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2009) Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al$_2$O$_3$. In: European Conference on Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference, CLEO Europe - EQEC 2009, 14-19 June 2009, Munich, Germany (pp. CK.P.1 MON).

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Abstract:Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.
Item Type:Conference or Workshop Item
Copyright:© 2009 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/69968
Official URL:http://dx.doi.org/10.1109/CLEOE-EQEC.2009.5191501
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